Stephen Brooks 🦆 on Nostr: High numerical aperture EUV #lithography tool makes patterns with 9.5nm width lines. ...
High numerical aperture EUV #lithography tool makes patterns with 9.5nm width lines.
https://www.anandtech.com/show/21513/imec-uses-highna-lithography-for-logic-and-dram-patterning-for-first-time
https://www.anandtech.com/show/21513/imec-uses-highna-lithography-for-logic-and-dram-patterning-for-first-time